摘要
建立了计算机自动控制测量 40 0nm～ 2 0 0 0nm椭偏光谱仪系统。经过实验检验了系统的重复性及准确度 。
A highly PC-controlled 400 nm～2 000 nm Spectroscopic ellipsometer was introduced. This system was tested and proved to be reliable and was applied in the thin film testing with high precision.
出处
《四川工业学院学报》
2002年第4期88-90,共3页
Journal of Sichuan University of Science and Technology
关键词
椭偏光谱仪
薄膜检测
近红外椭偏光谱
计算机控制
spectroscopic ellipsometer
thin film testing
near IR spectroscopic ellipsometry
