溶胶-凝胶法制备的纳米In_2O_3气敏性能研究

Study on preparation of nano-sized In_2O_3 by Sol-gel method and their gas-sensitive properties

以氯化铟为前驱体 ,通过溶胶 -凝胶法制备了纳米In2 O3 颗粒 .经TG -DSC热分析表明 :In(OH) 3 在 2 72 9℃附近脱水形成In2 O3 .经XRD ,TEM等手段表征的结果显示 :所合成的纳米In2 O3属立方晶型 ,晶粒尺寸约 2 0nm .气敏性能测试结果表明 :纳米In2 O3 气敏元件对TMA及NH3 灵敏度高 .通过与某公司提供的粒度为 3.0 77μm的In2 O3 制成的气敏元件比较得知 ,纳米In2 O3 气敏元件对TMA的灵敏度提高特别明显 .

Using InCl 3·4H 2O as precursor,the nano-sized In 2O 3 powders were prepared by Sol-gel method.The investigated results of TG-DSC,XRD,TEM show that nano-sized In 2O 3 crystals of cubic lattice are obtained at about 272.9 ℃ and the mean grain size is about 20 nm.The results of gas-sensitivity detect indicate that the nano-sized In 2O 3 sensors have higher sensitivity to TMA and NH 3 than micron-sized ones,about 3 μm,particularly to TMA.