溶胶-凝胶法制备的SnO_2薄膜气敏特性研究

The gas-sensitive property of SnO_2 thin film prepared by Sol-gel method

以SnCl4 ·5H2 O为原料、用Sol gel法制备出了SnO2 薄膜 ,并对该薄膜的气敏特性进行了测试 .结果表明 ,SnO2 薄膜低温下对乙醇气体有较高的灵敏度和较快的响应恢复时间 ,且长期稳定性较好 .

A kind of SnO 2 thin film was prepared by Sol-gel method using SnCl 4·5H 2O as raw material.The gas-sensitive property of the thin film is tested.The result shows that the sensor has good C 2H 5OH sensing property such as high sensitivity,rapid response-recovery time,low power consumption and satisfying long term stability.