摘要
介绍了以DX - 3扫描电镜为基础 ,利用SDS - 2电子束扫描系统改装其偏转系统。并给出了磁聚焦和静电的偏转场相复合情况下竖轴点源的三级几何像差系数和一级色差系数公式。应用中表明 ,复合系统结构简单紧凑 。
The application of SDS 2 E beam scanning system in DX 3 SEM is introduced. The deflection system of DX 3 has been rebuilt with SDS 2 system. Given are the formulas of the first order chromatic and the third order geomatric aberration coefficients in the superimposition of both magnetic focus and static deflection field for the point source on the z axis. The application shows that the superimposed system has simple construction, small aberration and no need for the aberration to be corrected dynamically.
出处
《微细加工技术》
2002年第4期7-10,共4页
Microfabrication Technology
