摘要
提出一种应用于电子束曝光机束流测量中的自动跟踪工频陷波器 ,给出电路结构 ,基于对其工作原理的分析 。
A new structure of linear auto tracking wave trap for power frequency is introduced. The wave trap is applied to measure the beam current in the electron beam exposure machine. Based on the analysis of the fundamental principles of the wave trap, its design keys for improving performances and the adjusting method are presented in detail.
出处
《微细加工技术》
2002年第4期11-13,共3页
Microfabrication Technology
关键词
电子束曝光机
束流
自动跟踪
工频
陷波器
工作原理
electron beam exposure machine
beam current
auto tracking
power frequency
wave trap
