摘要
在一种新的电子束曝光机二次曲线单元图的基础上定义了一种中间图形数据格式。该数据格式是为了将版图制造业标准数据格式转换为电子束曝光机专用数据格式服务的。它采用NiklansWirth的表示方法[1] 进行定义 ,消除了二义性。经过实验性的程序验证 ,它不仅能很好地解决版图制造业标准数据格式不支持二次曲线的问题 ,而且图形设计人员可以直接以该数据作为标准 ,进行曝光图形的设计与存储。该数据格式的出现 ,为二次曲线单元图形在电子束曝光技术中的广泛应用奠定了良好的基础。
A conic primitive based intermediate pattern and its data format of electron beam lithography are defined. They are used to convert the standard industrial pattern data formats, such as GDSⅡand CIF, to the specific format for the electron beam lithography machine. This data format is described in the method proposed by Niklans Wirth, which eleminates its unambiguousness. It has been proved by the experimental program that the problem that standard industrial data formats do not support the conic curve can be solved. And the pattern designers can also design and save patterns in terms of this data format. The data format privides a basis for making wider use of the conic primitive in electron beam lithography.
出处
《微细加工技术》
2002年第4期14-20,31,共8页
Microfabrication Technology
关键词
电子束曝光机
中间图形
数据格式
二次曲线单元图形
conic primitive
intermediate pattern
data format conversion
electron beam lithography
