摘要
介绍了用于电子束缩小投影曝光机的标记对准模拟软件及标记图形 ,模拟出标记对准的背散射信号 ,并与实际实验信号图形进行了对比。
The alignment simulation software for PELDI and the mask image are designed and described.The BSE signals of the alignment mask are simulated and compared with the practical experimental results.
出处
《微细加工技术》
2002年第3期33-35,43,共4页
Microfabrication Technology
