SEM测量微细工件表面粗糙度的一种方法

The Use of SEM in Micro-Surface Roughness Measurements

介绍一种用扫描电子显微镜(SEM)来测量微细工件表面粗糙度的方法,可在微电子元件如TO-5封装的焊线顶上应用.操作时,电子显微镜发出电子束对样品表面进行扫描,而反映表面波纹状况的二次电子强度可用底片摄录;照片上的波纹曲线再用一自制的数码转换器转成数码信号,输入微型计算机处理后可求得粗糙度.用此法求得的结果与传统的表面波纹测量法极为吻合.

A method making use of the scanning electron microscope is developed to measure the surface roughness of a microscopic sample such as the top of a connecting post of TO-5 package. The electron beam of the SEM scans along the surface. The intensity of the emitted secondary electrons which reveal the surface profile is recorded on a photographic plate. A home-made digitizer is built and has been found to be a versatile tool. The curve is digitized and the roughness is estimated. The results obtained by this method compare favorably with conventional profilometrie method.