摘要
本文叙述用PVD方法沉积硬膜技术的现状及其重要意义。重点介绍了近两年来国际上的最新进展,包括多元混合相、过渡层及复合膜层等概念的提出。对国内PVD沉积硬膜技术的发展谈了一点看法。
The state and the importance of the technology of PVD hard coating arebriefly described in this paper.Several recent advances in PVD hard coatings,including multicomponent,mixed phases,gradient layers,multilayers and soon,are discussed.Some views are put forward on PVD hard coatings in ourcountry.
出处
《电工电能新技术》
CSCD
北大核心
1992年第1期22-26,共5页
Advanced Technology of Electrical Engineering and Energy
