摘要
冷等离子体高的活性,可以引起多种化学反应或物理掺杂,对于低温下材料表面的改性有着较大优势。讨论了描写冷等离子体输运过程的Fokker-Planck方程,同时提出了目前Fokker-Planck方程描写存在的困难以及解决的可能途径。
The activity of cold plasma could lead to many kinds of chemistry reaction and physics mixture, with potential advantage for surface modification of material under low temperature. Fokker-Planck equation in cold plasma is discussed, and the currently existing problems and the way to solve it were pointed out.
出处
《黑龙江大学自然科学学报》
CAS
2002年第4期78-81,共4页
Journal of Natural Science of Heilongjiang University
基金
黑龙江省教育厅科学技术研究指导项目(10513015)
哈尔滨学院科研基金资助项目
