摘要
介绍了摩尔定律及其寿命和争议。同时介绍了ITRS2 0 0 1及其对缩小芯片特征尺寸的争议。讨论了影响摩尔定律寿命的半导体工艺及设备 ,如光刻工艺及设备、互连工艺及设备和纳米半导体工艺及设备。
In this paper,the Moore's Law, Life and controversy are introduced.The ITRS 2001 and controversy for the chip feature size redution are introduced.The semicoductor technology and equipment that have influence on the life of the Moore's law are discussed,such as the lithography technology and eguipment,the wiring technology and eguipment,the nanosemiconductor technology and equipment.The proposal for the development of China's semiconductor equipment are advanced.
出处
《电子工业专用设备》
2002年第4期196-199,共4页
Equipment for Electronic Products Manufacturing
关键词
摩尔定律
半导体设备
光刻设备
互连设备
纳米
Moore's law
Lithography equipment
Wiring equipment
nanosemiconductor equipment
