摘要
分析了低温冷凝泵的工作原理和内部结构 。
In this article we analysis the working theories and the inner constructions of Cryo Pump.We state the maintenance and regeneration of Cryo Pump in detail combined with our experiences and application on E-beam deposition system.
出处
《电子工业专用设备》
2002年第4期246-248,共3页
Equipment for Electronic Products Manufacturing
关键词
低温
冷凝泵
结构
维护
工作原理
Cryo Pump
construction
maintenance
application
