隧道磁阻微陀螺结构设计与加工

Structure Design and Processing of Tunneling Magnetoresistance Micro-Gyroscope

微机械陀螺的核心技术是微弱柯氏力的检测,而常规的微弱柯氏力检测水平已达到极限.本文设计了一款新颖的基于隧道磁阻效应检测的面内微陀螺结构,利用隧道磁阻效应的高灵敏特性来实现微弱柯氏力的高灵敏检测.阐述了隧道磁阻微陀螺的工作原理,分析了微陀螺的动力学方程,完成了微陀螺结构设计、工艺加工及测试.测试结果表明:微陀螺驱动方向和检测方向谐振频率分别为6 853Hz和6 854Hz,与理论仿真基本一致;微陀螺驱动方向Q值为571.1,检测方向Q值为527.3,结构灵敏度为15.3nm/°/s.

The core technology behind micromachined gyroscopes is the detection of the weak Coriolis force,the detection level of which by conventional methods has reached its limit,.In this paper,an inplane gyroscope structure based on the tunneling magnetoresistance effect is designed providing a means to detect this force in the MEMS vibratory gyroscope.The working principle of micro-gyroscopebased on tunneling magnetoresistanceeffect is described,the dynamic equations of micro-gyroscope are analyzed.The micro-gyroscope structure design,processing technology and testing are completed.The test results show that the driving and sensing modes match well having mode frequencies of 6 853 Hz and6 854 Hz,respectively,basically consistent with theoretical simulation.The quality factor(Q)of the drive and sense mode are 571.1 and 523.7,respectively.The structure sensitivity of micro-gyroscope is15.3 nm/°/s.