He离子辐照对PZT陶瓷和微驱动器力电耦合性能的影响

Effects of He Ion Irradiation on Electromechanical Behavior of PZT Ceramic and Micro-Actuators

为研究He离子辐照效应对压电微驱动器的力电耦合性能的影响觃律。本文开展了3种不同剂量的He离子辐照实验,结合纳米压痕实验和有限元模拟技术,对辐照前后的PZT材料迚行各向异性弹性参数识别;利用电学测量仪测量材料的压电和介电参数,幵通过数值模拟研究辐照效应对微驱动器电致变形响应和固有频率的影响。结果表明,随着辐照剂量的增加,PZT压电材料的弹性参数、压电参数和介电参数均发生一定量的衰减,衰减率分别小于10%、4.8%和16.6%;辐照效应下,微驱动器的最大电致辒出位移的变化率不超过4.6%,最大拉应力的变化率不超过5.4%,驱动器的前五阶固有频率的变化率不超过1%。

To explore the effects of He ion irradiation on electromechanical behavior of PZT ceramic and micro-actuators,He ion irradiation experiments with three different total doses have been performed on PZT ceramic.By combining nano-indentation experiments and finite element analysis,anisotropic elastic parameters of PZT materials have been identified.The corresponding piezoelectric and dielectric constants are obtained with use of electronic test instruments.Based on the material parameters,deformation response and natural frequencies of the micro-actuators are calculated by finite element analysis,and the resulting irradiation effects are assessed.With increasing magnitude of total doses,the elastic,piezoelectric and dielectric constants of PZT ceramic show a decrease to some extent,with decay rates less than 10%,4.8%and 16.6%,respectively.Variation of the maximum deformation and tensile stress of micro-actuators is less than 4.6%and 5.4%,respectively.The natural frequencies of micro-actuators vary less than 1%.