摘要
利用斜坡发生器、折线表及可变比值设定自动控制等技巧性的特殊手段,构成多晶硅装置中的氢化炉自动提量控制系统,实现了提量过程的全自动化控制。克服了人工提量形成的物料阶梯式上升的弊病,简化了提量操作,增强了工艺过程的稳定性,提高了控制精度,同时降低了工作人员的劳动强度。
The slope generator,polyline table and variable ratio setting were adopted to constitute a control system for hydrogenated furnace's auto-increasing of quantity in a polycrystalline silicon device so as to realize a fully-automatic control. The results show that this system can eradicate stepped rising of materials incurred by manual operation and can simplify the operation,enhance the process stability and improve the control accuracy as well as reduce the labor intensity.
出处
《化工自动化及仪表》
CAS
2016年第4期353-358,共6页
Control and Instruments in Chemical Industry
关键词
自动提量控制系统
斜坡发生器
折线表
可变比值设定自动控制
control system for auto-increasing of quantity
slope generator
polyline table
auto-control over variable ratio setting
