摘要
介绍了分压力质谱计校准装置的结构、工作原理及分压力测量方法 。
The construction of the calibration system of mass spectrometers for partial pressure,its principle and measurement methods also are introduced.In addition, the uncertainty analysis of partial pressure measurement and sensitivity calibration are presented.
出处
《航空计测技术》
2002年第6期35-40,共6页
Aviation Metrology & Measurement Technology
关键词
分压力
质谱计
校准装置
不确定度
partial pressure
mass spectrometer
calibration
uncertainty
