摘要
用热蒸发沉积和自然氧化及加热法制备纳米量级的Al/Al2 O3 薄膜和多层膜。本文用X射线光电子能谱 (XPS)和紫外光电子能谱 (UPS)对样品进行价带能谱的检测与分析。获得的Al/Al2 O3 多层膜价带的XPS光电子能谱谱形基本相似 ;通过对Al/Al2 O3 三层膜在不同极角的UPS谱线的检测 ,得到其Ei (k∥i )关系曲线。此外 ,测定了低温下的I U特性 ,发现纳米量级的Al/Al2 O3 薄膜具有负阻特性。
Al/Al 2O 3 nano layer were grown on glass substrates by thermal evaporation and spontaneous oxidation.The valence band of 8 different samples was studied with X ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS).The results show that the shape of the UPS spectra of the 8 samples appear almost identical.The E i ( k ∥ i) relations of the sample with 3 bilayers was obtained from the UPS spectra at different polar angles.The I U characteristics of the samples at low temperature (77 K) was also studied.Interesting finding is that negative resistance was found to exist in the 2 bilayers sample with a nanoscale bilayer period.
出处
《真空科学与技术》
CSCD
北大核心
2002年第6期412-416,共5页
Vacuum Science and Technology
