信号调制法测量中性粒子ESD脱附截面

Measurement of Electron-Stimulated-Desorption Cross Section of Neutral Particle by Pulse Modulation

SD截面是电子诱导脱附研究中的用以描述脱附产物的一个重要物理量 ,中性粒子ESD脱附截面的测量一直是ESD截面测量中比较难以解决的问题。本文介绍了利用信号调制法测量了中性粒子ESD脱附截面的原理 ,同时利用该方法测量了 1× 10 -3 Pa下 ,N2 从多晶W表面脱附时N2 的中性脱附产物的ESD截面 ,并对实验方法及测量结果进行了分析讨论。

A novel technique,in which pulse modulation was used,was successfully developed to measure the electron stimulated desorption(ESD)cross section of neutral particles,the measurement of ESD cross section of neatral particles is an important but rather elusive physical quantity.The operating principle of the pulse modulation technique was discussed.The ESD cross section of nitrogen gas molecules,electrically neutral,absorbed on polycrystalline tungsten surfaces,at the pressure of 1×10 -3 Pa,was measured and discussed.