摘要
利用四极质谱计测试了国产金属铍材在 10 0℃～ 6 0 0℃不同温度下的真空出气成分及相对含量 ,实验得出铍的大量出气主要在温度 4 0 0℃～ 5 0 0℃之间 ,其放出气体的主要成分按放气量大小依次为H2 O ,CO2 ,N2 ,CO ,Ar和H2 ,利用限流小孔半定量的计算了铍材的出气量。
The degassing behavior of beryllium produced in China under vacuum at temperatures from 100 ℃ to 600 ℃ is studied with a Quadrupole Mass Spectrometer.The maximum degeassing rate is observed at 400 ℃ to 500 ℃ and the predominant components are H 2O,CO 2,N 2,CO,Ar and H 2.The quantities of the outgas are obtained by measaring the pressure difference across an orifice of known conductivity.
出处
《真空科学与技术》
CSCD
北大核心
2002年第6期459-462,共4页
Vacuum Science and Technology
