化学气相沉积金刚石薄膜的摩擦学性能研究进展

Research Progress on Tribological Properties of Diamond Films Produced by Chemical Vapor Deposition

介绍了化学气相沉积金刚石薄膜的主要方法 ,着重讨论了金刚石薄膜的摩擦学性能研究 ,简要分析了化学气相沉积金刚石薄膜中存在的问题。

The main meththods of diamond films produced by chemical vapor depositon are introduced,the tribological properties of diamond films are discussed mainly and the problems in diamond films are nalyzed simply