CVD-PyC界面层和SiC涂层厚度数学计算模型的建立与验证

Establishment and confirmation of mathematical computational model of thickness of CVD-PyC interface and SiC coatings

建立了合适的化学气相沉积碳界面层厚度数学计算模型和SiC涂层厚度数学计算模型,并通过工艺实验对该模型进行了验证。结合实验结果分析,发现通过该模型计算出的化学气相沉积碳界面层厚度和SiC涂层厚度与SEM照片分析结果基本接近,因此可利用上述模型估算出C/SiC复合材料产品的化学气相沉积碳界面层厚度和SiC涂层厚度,快速评估C/SiC复合材料产品化学气相沉积质量能否满足实际工况使用要求。

The appropriate mathematical computational models for thickness of the chemical vapor deposition carbon interface and the chemical vapor deposition SiC coating were established.Combined with the experimental result analysis,it is found that the thickness values of the chemical vapor deposition carbon interface and SiC coating calculated by the models are closed to the results got from the common SEM picture analysis.As the result,the thickness values of the chemical vapor deposition carbon interface and SiC coating of the C/SiC composite products can be estimated through the established model,thereby it can be used to judge quickly whether the chemical vapor deposition quality of the C/SiC composite products satisfies the requirements of the actual working condition.