面向微电子超声键合的精密气浮定位平台特性分析

Characteristic of a 2-DOF air-supported precision positioning table for microelectronic ultrasonic bonding

基于有限元方法,详细考察了两自由度气浮支撑定位平台的静动态特性.建立了定位平台的有限元模型,分别对其进行了静态、模态和瞬态分析.通过静态分析,考察了系统在静力载荷作用下的响应特性;经模态分析,获取了定位平台的固有频率以及模态振型;通过施加脉冲力激励,探讨了系统的脉冲响应,通过方波力信号模拟定位平台的实际工作状态,得到了定位平台的瞬态响应特性.结果表明,该定位平台具有良好的静动态特性,为该类气浮支撑定位平台的结构优化设计与控制提供了重要信息.

Based on finite element analysis,the static and dynamic characteristics of a 2-DOF air-supported positioning table were studied in details.The finite element model of the positioning table was established,and the static,modal and transient analyses were discussed,respectively.The static characteristics of the table under static,load were investigated through static analysis.The natural frequencies and modal shapes of the positioning table were achieved by modal analysis.By applying the pulse force,the impulse response of the system was investigated.The transient response characteristics of the table were obtained by using the square wave force to simulate the actual working state of the positioning table.The results show that the positioning table exhibited good performance,and it provides important information for the structure optimization design and control of such air-supported positioning tables.