划痕试验法对特殊薄膜系结合力的检测与评价

Experiment and Evaluation of Coalescent Properties of Some Special Film-Substrate Systems by Scratching Method

简要介绍了划痕试验法测量表面薄膜与基体结合力的测试原理和实验方法,讨论了影响临界载荷Lc测量值准确性的主要因素.通过对薄膜系的分类以及大量实际测量数据的总结和分析,认为被测薄膜以及基体的物理化学特性对临界载荷的测量具有重要的影响,单纯从声发射信号的变化来确定临界载荷的方法有可能存在较大误差.分析和讨论了某些特殊薄膜系的声发射信号与其实际临界载荷值之间存在较大偏差的现象和原因,并提出了针对不同膜系,合理利用声发射曲线、摩擦力斜率以及显微观测来正确判定临界载荷的必要性.

The measuring principle and procedure of coalescent force between thin solid films and substrates by scratching method were briefly introduced. Some important factors influencing the final experimental result, the accuracy of measured critical load (Lc) were discussed. By classifying the filmsubstrate systems and summarizing a great deal of experimental data, it was concluded that the physical and chemical characteristics of films and substrates are very important parameters for the scratching experiments. For some special filmsubstrate systems, great errors of measured critical loads might be obtained when using sound emission signal only, and the reasons were analyzed and discuessed. It was suggested that reasonably using the sound emission signal, slope of friction force curve and microscope observation to determinate the position of critical load are very necessary.