低温等离子体技术对金属表面的改性与保护

Metal surface modification and protection by low temperature plasma techniques

概述低温等离子体技术在金属材料表面改性与保护方面的研究进展 ,以及低温等离子体技术的特点和应用。

This paper briefly reviews progresses in metal surface modification and protection by cold plasma technology. Many properties of metal materials like surface hardness, corrosion resistance and friction resistance will determine their applications. The low temperature plasma can influence the surface properties of materials, but cannot change its bulk property. N2 ion source iion implantion and plasma immersion ion implantion (PIII) can form iron nitrides like Fe2N, Fe3N and Fe4N which may improve their surface hardness, corrosion resistance and friction resistance.