采用钨电极材料制造抗大浪涌电流冲击玻璃钝化高压硅堆的工艺研究

Using Tungsten Electrode Materials to Sustain Surge Current Shock Glass Passivation High-Voltage Silicon Stack Technology Research

本文通过介绍采用钨电极代替传统钼电极材料运用于高压硅堆的制造,并使用与钨电极热匹配性能更好、机械强度更高的钝化玻璃粉进行器件的封装,提高了玻璃钝化实体封装结构的高压硅堆抗大浪涌电流能力,同时提升了器件的抗温度冲击能力。

This article uses the tungsten electrode through the introduction to replace the traditional molybdenum elec-trode material to utilize the manufacture which piles in the high-pressured silicon, and uses and the tungsten elec-trode hot match performance is better, the mechanical strength higher deactivation glass dust carries on the componentthe seal, enhanced the glass deactivation entity seal structure high-pressured silicon to pile the anti-big surge currentability, simultaneously has promoted the component anti-temperature impact ability.