平行三点法圆度误差分离技术的精度分析

Accuracy Analysis of the Parallel Three-Probe Error Separation Technique for On-Machine Measurement of Roundness

阐述了一种能临床测量与分离工件圆度误差和主轴系统回转误差的新方法——平行三点法误差分离技术的测量原理 ,定量分析了测量装置的结构参数、传感器初始调零误差、传感器随机误差和标定误差对圆度测量精度的影响 ,给出了误差传播方程。并讨论了一些消除或减小上述误差的方法。

A new measurement principle for the parallel three-point method is proposed to separate the roundness error of cylindrical workpieces from the rotational error of the spindle in on-machine conditions. We first analyze quantitatively the measurement accuracy of the new method and the error introduced to the measurement results of roundness by the structure parameters of measurement stage, the misalignment of the sensors, the random error of the sensors and the calibration errors of the sensors. Their error propagation equations are then derived. Finallys some measures for eliminating or diminishing the influences of these factors are discussed.