红外测厚仪及提高其精度的方法

Infrared Thickness Gauge and Methods for Increasing precision

本文在讨论利用红外吸收原理的红外测厚仪基本结构的基础上,着重研究了非线性(偏离Beer-Lamben定律)、材质、干涉条纹对测量的影响,给出了提高精度的设计原理和方法.

Based on the discussion about two wavelength infrared thickness gauge by means of the principle of infrared absorpting, this paper mainly examines the influence of non-linearity (which deviates from Beer-lambert Law), filled materials as well as interference fringes on measurement, so as to put forward the design principle and methods for increasing precision.