同轴空心激光检测圆柱内孔圆度误差的方法研究(英文)

Research on the method of detecting the roundness error of cylindrical inner-hole by using coaxial hollow laser

文中提出了一种基于同轴空心激光检测圆柱形内孔圆度误差的新方法。根据圆锥透镜的几何光学特性和圆柱内孔的物理结构特征,设计了一种一次反射检测光学系统,并进行了实验,实现了对某圆柱内孔圆度误差的测量。采用最小二乘法分析了测量数据,结果表明:检测精度可达0.1μm。该方法具备非破坏性、非接触、高精度、低成本等优点,可广泛用于检测形变和位置误差。

A new method of detecting roundness error of cylindrical inner-hole based on coaxial hollow laser technology was presented. In view of the optical properties of cone lens and structural characteristics of cylindrical inner-hole, a detecting optical system which permits to reflect the detecting beam only once was presented. In the experiment, the roundness error of the cylindrical part was tested, and the test data was analyzed with the least square method. The result shows that the detection accuracy can reach 0.1 μm.The method shows the advantages of optical detection technology such as non-destructiveness, noncontact, high precision and thus it can be used to detect the morphology and position error.