高速钢刀具镀氮化碳超硬涂层研究

Research on Depositing C_3N_4 Superhard Coating Film onto HSS Tool

为了在高速钢刀具上制备先进的氮化碳超硬涂层,采用DC反应磁控溅射和电弧离子镀相结合的方法在高速钢上沉积氮化碳—氨化钛复合膜,经X射线衍射分析,复合膜中存在α—C_3N_4和β—C_3N_4两种硬质相。复合膜的显微硬度(HK)为50.5～54.1GPa,用划痕试验测量它与高速钢基体的附着力,测得临界载荷L_c=40～80N,多种刀具试用证实,该涂层具有很高的耐磨性,与未涂层和镀TiN的刀具相比,大幅度提高了刀具的耐用度。

For depositing advanced superhard coating film of Carbon Nitride onto high speed steel tool , by combination of DC reaction magretron sputtering with multiple arc plating, the superhard coating is deposited onto high speed steel, and a compound thin film exists in the form of hard crystalline phase using X ray diffraction (XRD) analysis. The microhardness Hv of the compound film is of 50. 5-54- 1GPa. The adhersive force of super-hard coating film with high speed steel base is of L = 40 -80N, by scratch test to measure the critical load, Many kinds of tool proves that coating has a very high wearabil ity, the tool life is great improved,as compared with TiN coated cutting tools and uncoated tools.