基于柔性铰链的压电微夹钳设计

Design and analysis on piezoelectric micro-gripper based on flexible hinge

面向微机电系统(MEMS)微装配设计了一种压电式微夹钳,该微夹钳基于柔性铰链设计,结构简单、紧凑,具有对称结构的两级位移放大机构,其驱动采用叠堆型压电陶瓷.重点对该微夹钳的张合缩放特性进行了理论分析,建立了电压与末端张合量输入输出模型.样机实验表明,驱动电压为140V时,该微夹钳具有约1 260μm的最大张合量,微操作实践表明:微夹钳能实现对不同形状尺寸大小从50~1 260μm范围的微小器件夹持操作.

A piezoelectric microgripper was proposed for micro-electro-mechanical system (MEMS) micro assembly.The micro-gripper based on flexible hinge was driven by piezoelectric ceramic stack, which has two levels of displacement amplification mechanism with symmetric structure.Theoretical analysis had being focused on the micro-gripper-zoom feature and the IO (input output)model of volt-age and decomposable tensor was built.Experimental results show that when the driving voltage is 140 V,and the gripper has a maximum decomposable tensor capacity of about 1 260 μm.The micro-operation practice shows that micro-gripper can achieve tiny device clamping operation for different shapes sizes from 50 μm to 1 260 μm range.