基于二维表面等离子体激元的微结构

The Microstructures Based on 2-dimensional Surface Plasma

在介电常数符号相反的两个材料的界面处可激发出表面等离子体激元 (Surface plasmon)。文中利用普通扫描电子显微镜中出现的电子束诱导沉积纳米碳基本现象 ,提出和发展了一种无需光刻胶和额外掩模的亚微米图形化技术。采用这一新方法 ,成功地在镀金的半导体 In Ga Al P量子阱表面制备了各种亚微米点阵结构 。

Surface plasma could be excited at the interface between materials with dielectric constant of opposite sign. In this paper, a technique of submicron patterning without resist and mask was proposed and developed. It utilizes the electron beam induced deposition of nanocarbon in an ordinary scanning electron microscope. By adopting this technique, a variety of patterns with 2 dimensional symmetric dots have been successfully prepared on the gold coated InGaAlP quantum well epitaxial samples. The enhancement of semiconductor visibel emission based on two dimensional surface plasma was demonstrated.