摘要
应用 MSM结构光电探测器相对光谱响应的理论公式 ,得到金刚石膜 MSM紫外光电探测器相对光谱响应理论曲线 ,与实验曲线进行比较 ,发现两者吻合得很好。探测器光谱响应的截止波长都在 2 2 0～ 2 3 0 nm范围 ,紫外光与可见光的相对响应度相差一个数量级。根据 MSM结构光电探测器光谱响应曲线拟合出金刚石薄膜厚度、少子扩散长度等表征参数 ,探讨金刚石膜吸收层反射率、吸收系数、金刚石的晶粒大小及金属电极叉指指宽、指距等参数对金刚石膜 MSM光电探测器光谱响应和量子效率的影响。
By the theoretical formulation of spectrum response to calculate the theoretical value of diamond MSM ultraviolet detector, we find that the theoretical curve is in good agreement with the experimental one. The cut off wavelength of spectrum response is around 220～230 nm and the normalized response of ultraviolet light is one magnitude order higher compared with that of visible light. Based on the simulation of spectrum response curve of diamond MSM ultraviolet detector, the characteristic parameters, such as the depth and the diffusion length of diamond, are gained. After that, we discuss the factors which are of great importance for the spectrum response, such as the diamond absorption coefficient and reflectivity, the diamond grain size, finger widths and finger spacings.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2002年第4期479-482,共4页
Research & Progress of SSE
