摘要
微机电系统是面向 2 1世纪的新科技。由于目前尚处于开创时期 ,人们对它还缺乏统一的全面认识。试图对微机电系统产生的背景、组成特征、发展现状及应用前景进行全面分析。在此基础上 。
Micro-electromechanical System is a high technology newly emerged in the 21th century. Now a universal and profound knowledge about MEMS is still deficient due to its infant period. This paper investigates the background, characteristics, state-of-the-art and application prospect of MEMS. Further more, several key problems involved in the future development are put forward.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2003年第2期159-163,共5页
China Mechanical Engineering
关键词
MEMS
工作模式
发展前景
微机电系统
micro-electromechanical system background characteristic key problem
