摘要
介绍基于电容传感器的非接触式检测方法和基于差动变压器式传感器的接触式检测方法 ,并参考有关文献对焦点位置的其他检测方法作了较为完整的综述 .
Two kinds of structures of laser focus position detecting system,using inductance transducer and capacitance transducer as sensor,are discussed.their advantages and disadvantages are discussed following.the principle how plasma caused in laser cutting process disturbs detecting of laser focus position is analyzed.Two ways to overcome this disturbing,changing the shape of pole plank of capacitance transducer and indirectly detecting way,are studied finally.
出处
《机械与电子》
2003年第1期41-43,共3页
Machinery & Electronics
关键词
激光切割
焦点位置
检测方法
laser cutting processing
focus position
detecting may
