摘要
根据扫描电子声学显微镜的要求,利用物镜光阑在第一透镜的上方形成的虚像作为斩束孔,分析了由三个透镜组成的电镜中电子束的斩束系统,给出了斩束光路设计和测试结果。
According to requirements of the scanning electron-acoustic microscopy (SEAM), using a virtual image for med final lens aperture above the first lens for a beam-chopping aperture, the beam-chopping electrode stractures are analysed in the SEAM, which is consist of three lenses. The beam-chopping optisal design and cxperimental results are given.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1992年第3期299-304,共6页
Journal of University of Electronic Science and Technology of China
关键词
电声显微镜
斩束
频率合成
electron-acoustic microscopy
beam-chopping technique
optical design
frequency synthesis
