摘要
在1.33×10^(-3)Pa真空度下,用电子束蒸发法在K_?玻璃上成功地淀积了厚度为1200～1500A的复合光学膜,测量了不同参数下制备的膜折射率的平均值,并从色散方程推导出了折射率随波长变化的理论公式,发现复合膜成份决定其折射率的大小值。真空度和衬底温度对折射率值也有明显的影响。文中也给出部分膜色散系数值。
The composite optical film with of thickness 1200—1500 A is deposited on a K_9 glass substrate with sources of composite and single materials by electron gun (e-gun) evaporation in vacuum pressure of 1.3×10^(-3) Pa: The refractivc index of optical films depositcd in different parametes is measured and theoretical formulas for calculating the refractive index of composite films are derived from dispersive equations . Comparing the experimental of variation of the refractive index with wavelength in the region 0.4μm—1.4 μm with the theoretical curves, it is found that the composition of films decides the refractive index .The substrate temperature and vacuum pressure have obvious influence on the refractive index of the films, The dispersive coefficients of the refractive index of composite films coated in different conditions here are given also.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1992年第6期620-624,共5页
Journal of University of Electronic Science and Technology of China
关键词
复合薄膜
折射率
色散
光学常数
composite films
refractive index
evaporation deposition
composite materials
dispersive coefficients
