电容式压力传感器微电容测量集成电路的研究

“Microcapacitance measurement circut for the sillicon integrated eapacitive transducers”

采用开关电容技术的Boxcar积分原理设计的,为测量电容式压力传感器微电容的接口电路已提出,它由Boxcar积分器,锁存器,脉冲宽度调制器和控制信号电路组成。 这个接口电路,采用3μmP-阱CMOS双层多晶硅栅工艺研制,管芯面积为2.5×3.5mm^2。测试结果表明,接口电路具有较好的灵敏度,它完全适用于与硅集成电容式压力传感器集成在同一芯片上。

A Boxcar integrator circuts using switched-capacitor technigues has been devoloped for the sillicon integrated capacitive transducers with digital interface sustems. It consists of a Boxcar integrator, a latch、 a pulse、 -width modulation (PWM) and Control single circuits.This intceface circuit is processed in 3μm P-well CMOS double-polysillicon process. The chip area is 2.5 x 3.5mm^(2) .This circuit has measured with a good sensitivity. The circuts suits On-chip well with sillicon integrated Capacitive transducers.