摘要
本文主要分析了16×16电容式触觉传感阵列中一种新的单元结构——异型膜结构的理论设计.建立了异型膜模型,并首次通过求解大挠度情况下的挠曲微分方程,对异型膜进行数值模拟,研究了异型膜的结构参数对传感器灵敏度的影响,并估算出外力的动态范围.结合实践,为阵列单元设计提供了可靠的理论依据.
In this paper the theoretical design of a new cell structure (--anisomeric membranestructure) of a 16 x 16 capacitive tactile sensor array is mainly analysed and its model is founded. With the deflection differential equations being first solved under large-deflection condition, the anisomeric membrane is numerically calculated. And the influence of the membrane's structural parameters on the pressure sensitivity is discussed. Moreover, the dynamic ranges of external forces are also presented. Combining with experiments, all this can provide reliable theoretical basis for the design of an array cell.
出处
《电子器件》
CAS
1992年第4期235-242,共8页
Chinese Journal of Electron Devices
基金
国家863高科技项目
关键词
触觉传感阵列
机器人
电容式
设计
anisomeric membrane, defection, sensitivity, membrane's size. membrane's thickness, the area ratio of the mas, olock to silicon membrane, external force.
