掠出射X射线荧光光谱仪研制

Grazing exit X-ray fluorescence spectrometer

掠出射X射线荧光分析技术是分析薄膜特性和介质表面的一种重要工具。文中简述了利用掠出射X射线荧光技术分析薄膜厚度的原理和方法,介绍了一种在实验室里由激发光源、样品承载系统、色散系统、探测系统和数据收集及处理系统构成的掠出射X射线荧光光谱仪系统,并给出了利用55Fe放射性同位素标定该光谱仪系统的试验结果。

The technology of grazing exit X_ray fluorescence is an important tool for the analysis of thin layer characteristics and media surfaces. The principle of analysis of thin layer thickness by this method is described in this paper. A grazing exit X_ray fluorescent spectrometer has been constructed in our lab, which is composed of an exciting source, a sample stage, a monochromator, and a detecting system, collecting data and compressing units. Meanwhile, the result of calibrating this spectrometer by .55Fe is presented.