摘要
压电泵作为一种新型压电驱动器,有着广阔的发展前景。本文综合国内外现有研究情况,分析了现有各类压电泵的结构、原理、性能、特点及应用情况,提出了压电泵目前存在的问题,并预测了未来几年的发展前景。
Piezoelectric pump, a new type of piezoelectric actuator, has many potential applications in the future due to its characteristics. Based on public literature, the state of research progress for a piezoelectric pump is surveyed in this paper, including its structure and principle.The performance is described, the application and main trends are also discussed.
出处
《光学精密工程》
EI
CAS
CSCD
2002年第6期619-625,共7页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.59975040)
国家863计划资助项目(No.2002AA431250)
关键词
压电泵
压电振子
研究进展
压电驱动器
piezoelectric pump
piezoelectric vibrator
research progress
