扫描电镜数字图象的采集处理和分析

Digital Image Acquisition,Processing and Analysis in Scanning Electron Microscopy

本文描述了对扫描电镜数字图象的采集、处理和分析的实验研究,其中主要包括多帧平均滤波,对比度增强处理,平滑滤波,边缘检测,伪彩色处理以及粒度统计分析。文中给出的例子充分说明了联机图象处理系统对于提高扫描电镜图象质量的重要意义。实验工作是利用中国科学院科学仪器厂英特公司开发研制的EMI—1型图象处理系统,在北京大学电镜实验室和KYKY—1000B扫描电镜联机而完成的。

The principle of on-line image processing system in SEM has been described and the experimental researches on digital image acquisition, processing and analysis have been carried out, which mainly include on-line real time im-age acquisition with multi-frame average filtering to raise the signal-noise ratio; several types of contrast enhance-ment; smooth filtering to reduce the noise; edge detection; pseudo-color enhancement of grey level image; binary image produced from grey level segmentation, and feature analysis. Typical examples of image processing and lea-ture analysis are shown in the paper, which exhibite remarkable effectives of the above processing and analysis functions, convincingly prove the great importance of the on-line image processing and analysis system in enhance-ment of the SEM image quality. The EMI-1 image processing and analysis system developed by YING-TE compa-ny of Scientific Instrument Factory of Academy of Science of China linked to KYKY-1000B SEM in the Electron Microscope Laboratory at Peking University has been utilized throughout the research work. By using the interface of TV camera, EMI-1 can also be used tO process the TEM and the optical microscope images. The slow scanning interface in EMI-1 can also be applied as the scanning attachment in TEM.