扫描电镜中X射线荧光能谱分析——改善分析灵敏度的一种方法

Energy Dispersive X-Ray Fluorescence Analysis in Scanning Electron Microscope—A New Technique to Improve Analysis Sensitivity

本文描述了我们在扫描电镜中用于X射线荧光分析的附加装置。对电子激发和X射线激发得到的能谱进行了比较。结果表明,在扫描电镜中用X射线荧光得到的能谱,峰背比(P/B)有明显的提高,能检测出样品中的微量元素。将本实验结果与JEOL的报导和用Tracor Xray公司的装置所做的实验结果相比较,说明本实验的装置在峰背比、束斑尺寸等方面都有明显的改善。在我们的实验中,原级X射线束斑直径小于1.

In this paper, we describe the attachment of X--ray fluorescence analysis build into a scanning electron micro-scope. A comparison of spectra excited by electron and by primary X--ray is given. It shows that the P/B of spec- tra acquired with SEM--EDXRF is much better than that of EDS spectra, thus the trace clemens in the specimen could be detected. These experimental results were compared with those reported by JEOL and with the experimen- tal results obtained by Tracor Xray EDXRF accessory. It shows that our appendix has been improved. The diameter of primary X--ray beam spot is less than 1.5ram in these experiments.