一种亚纳米级分辨力同轴式激光轮廓测量系统

Measuring System of Sub-nanometer Level Resolution Coaxal Interference Laser Profilometer

分析了一种同轴式激光轮廓测量系统的工作原理,开发出了一套基于WINDOWS的测量控制软件,使它具有自动控制、数据采集、信息处理及结果输出等功能,可以用三维图形直观显示被测量物体表面微观形貌、进行多种表面粗糙度参数计算。此测量系统的分辨力优于0.1nm,重复性2σ优于1.2nm。

A coaxal interference microprofiling system with subnanometer resolution is introduced in the paper. The Principle of the laser system and the software of measuring control as well as data process are described. The measuring results can be displayed through three dimension graph. The resolution of this system is better than 0.1 nanometer, and repeatability (2σ ) is better than 1.2 nanometer.