摘要
本文根据作者几年来的工作实践,总结了日立S-450扫描电镜在操作中碰到的一些故障及维修方法。
On the basis of experiences and practice for several years, the auther of the paper has summarized some troubles met in operating the S-450 SEM and its service.
出处
《电子显微学报》
CAS
CSCD
1992年第6期489-490,共2页
Journal of Chinese Electron Microscopy Society