摘要
简要回顾了半导体电子器件由真空电子管到固体晶体管,直至纳米电子器件的发展历程。分别比较了不同的半导体电子器件的材料、理论和所采用的制备技术。在此基础上综述了当前较热门的纳米电子学和固态纳米电子器件,并由纳米器件的分类简单介绍了当前固态纳米电子器件的三个部分,即量子点、谐振隧穿器件和单电子晶体管。最后对半导体器件的发展提出了展望。
In this paper,the developing course of semiconductor electron device is simply retro-spected,which mainly includes the vacuum tube,solid transistor and nanoelectron device.And the materials,theories and manufacture techniques adopted by different semiconductor electron device are compared.On the base of which,the nanoelectronics and solid nanoelectron device are reviewed.The classification of nanometer device and solid nanoelectron devices including quantum dot and resonance tunnel device and single electron transistor are reviewed.Finally,the development and expectation are put forward.
出处
《微纳电子技术》
CAS
2003年第1期6-11,共6页
Micronanoelectronic Technology
