摘要
The JEOL JBX-5000LS is a vector type machine.The system hardware features an ion-pumped column,a LaB 6 electron emitter,25kV and 50kV accelerating voltage,and a turbo-pumped sample chamber.The resolution,stability,stitching and overlay of this system are evaluated.The system can write complex patterns at dimensions down to 30nm.The demonstrated overlay accuracy of this system is better than 40nm.
JEOL JBX- 5 0 0 0 L S是矢量扫描的电子束曝光机 .系统采用 L a B6 灯丝 ,可以工作在 2 5 k V和 5 0 k V的加速电压下 .对该系统的分辨率、稳定性、场拼接和套刻精度进行了系列研究 ,得到了分辨率为 30 nm的图形 ,图形的套刻精度也优于 4 0 nm.
基金
国家自然科学基金资助项目 (批准号 :6990 60 0 6)~~
