实现平面度测量电容传感器实验研究

The Experimental Studies on Capacitive Sensor in Measurement of Planeness

本文介绍了一种用于平面度测量的电容传感器的结构及其测量电路,提出了电容传感器的制作方法及实现平面度测量的设计方案。通过对该传感器进行实验研究和理论分析,给出了这种电容传感器可实现平面度测量的结论。

The structure and measuring circuits of capacitive sensor used in measurement of planeness are introduced in this paper. The fabricating method of sensor and measuring plan of planeness are also proposed. The conclusion that the sensor can realize measurement of planeness is obtained according to the experimental studies and theoretical analysis.