微机器人技术在超精密加工中的应用研究

The Research of Applications of Micro Robots for Ultraprecision Machining

文中阐述了超精密加工技术的发展现状及实现方法。通过介绍微机器人技术在超精密加工中的具体应用,论证了微机器人技术在超精密加工及精密工程中的应用价值。

The paper described the state of art of altraprecision machining and its fabrication methods.By analyzing the details of applying microrobots for ultraprecision machining,the practice value of robotics for ultraprecision machining and precision engineering is discussed.