利用扫描电镜和原子力显微镜测量纳米微孔阳极氧化铝膜

MEASUREMET OF NANOSCALE POROUS ANODIC ALUMINA BY SEM AND AFM

利用多孔型阳极氧化铝膜（PAA）制备纳米材料是近年来研究的热点之一，对PAA的形貌进行准确的表征具有重要的意义.文章首先分析了传统的扫描电镜（SEM）观测方法中镀膜工艺对样品和测量结果的影响，并提出了对镀膜过渡区进行观测的方案.然后着重研究了利用原子力显微镜（AFM）对PAA进行无损测量的方法，比较了不同测量模式下的测量结果，并利用Reiss模型对“针尖-样品卷积效应”进行了有效的修正.文章的研究结果不仅适用于多孔型阳极氧化铝膜这一研究领域，对于纳米多孔材料的测量也有普遍的参考价值.

The fabrication of nanoscale materials with porous anodic alumina (PAA) is an important research topic,for which it is necessary to measure the topography of PAA with high accuracy. The influence of gold plating on samples and the measuried scanning electron microscopy results are presented. Then, the method to measure PAA nondestructively by atomic force microscopy is investigated. The various results under different measuring modes are compared, and the influence of the 'tip-surface convolution' on the results is revised. The significance of this research is not only in the porous anodic alumia research field but also in the measurement of nanoscale porous materials.