摘要
阐述了在半导体生产中悬浮分子污染 (AMC)的来源和测试方法 ,介绍了一种新颖的AMC滤材 。
The article elaborated the source of airborne molecular contamination in manufacture semi-conductors and test method, it also introduced a new and original AMC filter media and compared them with other filter media.
出处
《产业用纺织品》
2003年第1期33-36,共4页
Technical Textiles
关键词
悬浮分子污染
过滤材料
玻璃纤维
测试
airborne molecular contamination, filter media, glass fiber, test
